Process Optimization for Femtosecond Laser Hole Drilling of Silicon Wafer

Micro-hole drilling with femtosecond fiber laser

In this paper, micro-hole drilling in ambient air is presented using fs fiber laser (750 fs & 1030 nm). Micro holes were fabricated in both transparent (glasses) and non-transparent materials (metals and tissues). Hole shape and morphology was characterized and evaluated with optical microscope and scanning electron microscopy (SEM). Debris-free micro holes with good roundness and no thermal da...

Micro-hole drilling and cutting using femtosecond fiber laser

Micro-hole drilling and cutting in ambient air are presented by using a femtosecond fiber laser. At first, the micro-hole drilling was investigated in both transparent (glasses) and nontransparent (metals and tissues) materials. The shape and morphology of the holes were characterized and evaluated with optical and scanning electron microscopy. Debris-free micro-holes with good roundness and no...

Title Influence of substrate heating on hole geometry and spatter area in femtosecond laser drilling of silicon

High integrity interconnection of silver submicron/nanoparticles on silicon wafer by femtosecond laser irradiation.

Welding of nanomaterials is a promising technique for constructing nanodevices with robust mechanical properties. To date, fabrication of these devices is limited because of difficulties in restricting damage to the nanomaterials during the welding process. In this work, by utilizing very low fluence (∼900 μJ cm(-2)) femtosecond (fs) laser irradiation, we have produced a metallic interconnectio...

Simulation of femtosecond laser ablation of silicon

Femtosecond laser ablation is an important process in the micromachining and nanomachining of microelectronic, optoelectronic, biophotonic and MEMS components. The process of laser ablation of silicon is being studied on an atomic level using molecular dynamics (MD) simulations. We investigate ablation thresholds for Gaussian laser pulses of 800 nm wavelength, in the range of a few hundred femt...